규소에 있어서 붕소의 확산에 대한 2차원적 수치해석 모델

Abstract

본 연구에서는 불활성 분위기에서 규소에 대한 붕소의 예비석출과 주입에 대한 확산모델을 세워 수치해석법으로 최종 농도분포를 계산하였다. 확산계수의 모델로서는 공공기구를 사용하였으며, Fair모델을 사용하였다. 붕소의 표면농도는 내삽법에 의해 구하였다. 확산 방정식의 선형화 방법으로는 유한 차분법을 사용하였으며, 해법으로는 Stone의 SIP 방법을 적용했다. 시뮬레이션 결과와 실험치의 비교로부터 제시된 모델의 유효성을 확인하였다.

In the present work, the final impurity distributions in silicon through boron diffusion processes in inert atmosphere were calculated using computer aided numerical analysis methods.

The diffusion coefficients of substitutional impurities were modeled with vacancy mechanism. It is assumed that the boron diffusion is governed by Fair model. The surface concentration of boron was approximated by the interpolation. For the linearization of diffusion equation the finite difference method was utilized. For the linearization of diffusion equation the finite difference method was utilized. For the solution of the resulting simultaneous equations the strong implicit procedure by Stone was used. It is observed that the simulated results of boron diffusions have been well-fitted to the experimental results.

In the present work, the final impurity distributions in silicon through boron diffusion processes in inert atmosphere were calculated using computer aided numerical analysis methods.

The diffusion coefficients of substitutional impurities were modeled with vacancy mechanism. It is assumed that the boron diffusion is governed by Fair model. The surface concentration of boron was approximated by the interpolation. For the linearization of diffusion equation the finite difference method was utilized. For the linearization of diffusion equation the finite difference method was utilized. For the solution of the resulting simultaneous equations the strong implicit procedure by Stone was used. It is observed that the simulated results of boron diffusions have been well-fitted to the experimental results.