Ultralow-dielectric-constant amorphous boron nitride
- Issued Date
- 2020
- Type
- Article
- Publisher
- NATURE
- Language
- 영어
- ISSN
- 0028-0836
- Citation Volume
- 582
- Citation Number
- 1
- Citation Start Page
- 511
- Citation End Page
- 514
- Appears in Collections:
- Engineering > Material Engineering
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