KLI

증착 후 전자-빔 조사 에너지에 따른 질화티타늄 박막의 특성

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Publisher
한국생산제조학회지
Language
한국어
ISSN
2508-5093
Citation Volume
29
Citation Number
4
Citation Start Page
305
Citation End Page
309
Appears in Collections:
Engineering > Material Engineering
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