증착 후 전자-빔 조사 에너지에 따른 질화티타늄 박막의 특성
- Publisher
- 한국생산제조학회지
- Language
- 한국어
- ISSN
- 2508-5093
- Citation Volume
- 29
- Citation Number
- 4
- Citation Start Page
- 305
- Citation End Page
- 309
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Appears in Collections:
- Engineering > Material Engineering
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