Influence of post annealing on Mn?doped (K0.5Na0.5)NbO3 thin films

Abstract

In this work, we synthesized the Mn-doped (K0.5Na0.5)NbO3 (KNMN) thin flms via RF-magnetron sputtering. The efect of the post-annealing temperature on the KNMN flm was studied in terms of its structural, ferroelectric, and leakage current properties. We achieved a single perovskite phase in KNMN flm. The crystalline quality of the KNMN flm was improved further via post-annealing the thin flm in the rapid temperature process (RTP), the increase in the intensity of the (100) peak as well as the identifcation of the additional (200) difraction peak. The increase in the ferroelectric performance and the reduction in the leakage current density of the post-annealed KNMN flm were attributed to the improved crystallinity of the KNMN flm. Based on the X-ray photoelectron spectroscopy results, we noticed that the efect of both the chemisorbed layer and the oxygen vacancies was weakened further, thus increasing the crystalline quality of the KNMN flm due to post-annealing.