STRUCTURE AND MAGNETIC PROPERTIES OF Nd5 FE77 B8/Cr THIN FILM DEPOSITED BY PULSED LASER ABLATION

Abstract

Ferromagnetic Nd15Fe77B8 and Nd15Fe77B8/Cr thin films were prepared on the Si(100) substrate using KrF excimer laser ablation, and the structural and magnetic properties were investigated as a function of substrate temperature and laser beam density. High magnetic properties of Nd15Fe77B8 thin films were observed at 620℃ of substrate temperate showing iHc=1120 Oe, 4πMr=6000Gauss in perpendicular direction. Magnetic properties of Nd15Fe77B8/Cr/Si thin films showed iFc=700 Oe, 4πMr=2000Gauss in perpendicular with Cr buffer layer of 100nm thick. X-ray diffraction data did not show preferred c-axis orientation. Auger electron microscopy revealed inter-diffusion of Cr and Si elements into Nd15Fe77B8 thin films.

Ferromagnetic Nd15Fe77B8 and Nd15Fe77B8/Cr thin films were prepared on the Si(100) substrate using KrF excimer laser ablation, and the structural and magnetic properties were investigated as a function of substrate temperature and laser beam density. High magnetic properties of Nd15Fe77B8 thin films were observed at 620℃ of substrate temperate showing iHc=1120 Oe, 4πMr=6000Gauss in perpendicular direction. Magnetic properties of Nd15Fe77B8/Cr/Si thin films showed iFc=700 Oe, 4πMr=2000Gauss in perpendicular with Cr buffer layer of 100nm thick. X-ray diffraction data did not show preferred c-axis orientation. Auger electron microscopy revealed inter-diffusion of Cr and Si elements into Nd15Fe77B8 thin films.