化學蒸着法에 依한 TiN被覆 超硬 合金 切削工具에 關한 硏究 (第一報)

Abstract

超硬合金 위에 化學蒸着法으로 TiN을 증착시켰을 때 蒸着因子인 Gas의 조성(H₂/N₂流量比), 蒸着時間, 蒸着溫度가 TiN의 Deposition Rate에 미치는 영향에 대해서 硏究하였다. 본 硏究에서 얻어진 결론은 다음과 같다.

1. TiN증착시 H₂/N₂Flow比가 2일 때 최적조건이며 Tool의 색깔은 Golden Yellow를 띄운다.

2. TiN증착은 蒸着時間의 평방근에 비례하며

3. 蒸着溫度가 증가할수록 TiN층의 두께는 增加하며 이때 活性化에너지는 46.5kcal/mole이었다.

The effects of the ratio of feed gas (H₂/N₂Flow ratio), deposition time and temperature on the deposition rate of the TiN Coated Cemented Tungsten Carbide Tools were investigated.

The results obtained are as follows

1. The Hydrogen to Nitrogen flow ratio of 2 is potimal and gives golden yellow diposits.

2. The deposition of TiN increased linearly with the square root of the desposition time.

3. The deposition temperature has pronouced effect on the deposition of TiN Coation thickness and an Activation Energy of 46.5Kcal/mole can be calculated.

The effects of the ratio of feed gas (H₂/N₂Flow ratio), deposition time and temperature on the deposition rate of the TiN Coated Cemented Tungsten Carbide Tools were investigated.

The results obtained are as follows

1. The Hydrogen to Nitrogen flow ratio of 2 is potimal and gives golden yellow diposits.

2. The deposition of TiN increased linearly with the square root of the desposition time.

3. The deposition temperature has pronouced effect on the deposition of TiN Coation thickness and an Activation Energy of 46.5Kcal/mole can be calculated.