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Ag 중간층이 SnO2 박막의 광학적, 전기적 특성에 미치는 영향

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Abstract
SnO2 single layer and SnO2/Ag/SnO2 (SAS) tri-layered films were deposited on the glass substrate by RF and DC magnetron sputtering at room temperature and then the effect of Ag interlayer on the opto-electrical performance of the films were considered. As deposited SnO2 films show a visible transmittance of 85.5 % and a sheet resistance of 1.2?104 Ω/□, the SAS films with a 15 nm thick Ag interlayer show a lower resistance of 18.8 Ω/□ and a visible transmittance of 70.6 %, respectively. The figure of merit based on the optical transmittance and sheet resistance revealed that the Ag interlayer in the SnO2 films enhances the opto-electrical performance without substrate heating or annealing process.
Author(s)
장진규김현진최재욱이연학허성보김유성공영민김대일
Issued Date
2021
Type
Article
Keyword
SnO2AgXRDAFM
DOI
10.5695/JKISE.2021.54.3.119
URI
https://oak.ulsan.ac.kr/handle/2021.oak/8991
https://ulsan-primo.hosted.exlibrisgroup.com/primo-explore/fulldisplay?docid=TN_cdi_nrf_kci_oai_kci_go_kr_ARTI_9828467&context=PC&vid=ULSAN&lang=ko_KR&search_scope=default_scope&adaptor=primo_central_multiple_fe&tab=default_tab&query=any,contains,Ag%20%EC%A4%91%EA%B0%84%EC%B8%B5%EC%9D%B4%20SnO2%20%EB%B0%95%EB%A7%89%EC%9D%98%20%EA%B4%91%ED%95%99%EC%A0%81,%20%EC%A0%84%EA%B8%B0%EC%A0%81%20%ED%8A%B9%EC%84%B1%EC%97%90%20%EB%AF%B8%EC%B9%98%EB%8A%94%20%EC%98%81%ED%96%A5&offset=0&pcAvailability=true
Publisher
한국표면공학회지
Location
대한민국
Language
한국어
ISSN
1225-8024
Citation Volume
54
Citation Number
3
Citation Start Page
119
Citation End Page
123
Appears in Collections:
Engineering > Material Engineering
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