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전자빔 조사 에너지에 따른 TIO/Ag/TIO 박막의 전기적, 광학적 특성 변화

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Alternative Title
Effect of Electron Irradiation on the Optical and Electrical Properties of TIO/Ag/TIO Films
Abstract
The influence of electron irradiation energy on the optical and electrical properties of TIO/Ag/TIO films has been investigated. These films prepared with RF and DC magnetron sputtering; they show the lowest resistivity of 4.71 × 10?? Ωcm. The visible transmittance also increased with the electron irradiation energy. The film irradiated at 700 eV shows 83.71% of visible transmittance. In addition, the electron irradiated films at 700 eV show a lower RMS roughness of 63.54 nm. Comparing the figure of merit, we conclude that the visible transmittance and electrical resistivity of the films are dependent on the electron irradiation energy; moreover, the opto-electrical performance of the film is enhanced by electron irradiation.
Author(s)
최수현허성보장진규김현진최재욱김유성공영민김대일
Issued Date
2021
Type
Article
Keyword
Ti doped Indium OxideAg inter-layerMagnetron sputterElectron irradiation
DOI
10.7735/ksmte.2021.30.5.410
URI
https://oak.ulsan.ac.kr/handle/2021.oak/8997
https://ulsan-primo.hosted.exlibrisgroup.com/primo-explore/fulldisplay?docid=TN_cdi_nrf_kci_oai_kci_go_kr_ARTI_9872461&context=PC&vid=ULSAN&lang=ko_KR&search_scope=default_scope&adaptor=primo_central_multiple_fe&tab=default_tab&query=any,contains,%EC%A0%84%EC%9E%90%EB%B9%94%20%EC%A1%B0%EC%82%AC%20%EC%97%90%EB%84%88%EC%A7%80%EC%97%90%20%EB%94%B0%EB%A5%B8%20TIO%2FAg%2FTIO%20%EB%B0%95%EB%A7%89%EC%9D%98%20%EC%A0%84%EA%B8%B0%EC%A0%81,%20%EA%B4%91%ED%95%99%EC%A0%81%20%ED%8A%B9%EC%84%B1%20%EB%B3%80%ED%99%94&offset=0&pcAvailability=true
Publisher
한국생산제조학회지
Location
대한민국
Language
한국어
ISSN
2508-5093
Citation Volume
30
Citation Number
5
Citation Start Page
410
Citation End Page
414
Appears in Collections:
Engineering > Material Engineering
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