Highly catalytic hydrogen sensing properties of the nano percolated Pd/ Mg/Ti nanoparticles layers decorated on Si substrate

Abstract

Highly catalytic hydrogen sensing properties of the nano percolated Pd/Mg/Ti nanoparticles layers on Si substrate have been investigated. The catalytic nanomaterials (Pd/Mg/Ti) were deposited on the Si substrate by using a radio frequency (RF) magnetron sputtering system. An optimized percolated sensing surface was introduced by varying the deposition conditions of the Pd/Mg/Ti nanoparticles (NPs) layers. After preparing the sensing device, resistance was observed to increase at the presence of hydrogen gas (H2) and a completely reversible process was recorded for its absence. Besides, the sensor shows significant results such as a broader sensing range (1,000 ~ 40,000 ppm), a fast response time of ~1 s for a 10,000 ppm (1 vol%) H2 concentration at 160 ?C temperature. A highly stable (up to ~50 days) sensing performance and good selectivity were also observed for the sensor. This Pd/Mg/Ti NPs layers on Si substrate have lucrative advantages as an H2 sensor for fast response and highly stable sensing performance.