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Highly catalytic hydrogen sensing properties of the nano percolated Pd/ Mg/Ti nanoparticles layers decorated on Si substrate

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Abstract
Highly catalytic hydrogen sensing properties of the nano percolated Pd/Mg/Ti nanoparticles layers on Si substrate have been investigated. The catalytic nanomaterials (Pd/Mg/Ti) were deposited on the Si substrate by
using a radio frequency (RF) magnetron sputtering system. An optimized percolated sensing surface was introduced by varying the deposition conditions of the Pd/Mg/Ti nanoparticles (NPs) layers. After preparing the
sensing device, resistance was observed to increase at the presence of hydrogen gas (H2) and a completely
reversible process was recorded for its absence. Besides, the sensor shows significant results such as a broader
sensing range (1,000 ~ 40,000 ppm), a fast response time of ~1 s for a 10,000 ppm (1 vol%) H2 concentration at
160 ?C temperature. A highly stable (up to ~50 days) sensing performance and good selectivity were also
observed for the sensor. This Pd/Mg/Ti NPs layers on Si substrate have lucrative advantages as an H2 sensor for
fast response and highly stable sensing performance.
Author(s)
Md Habibur RahamanUsman Yaqoob우딘 엠디 마이옌김현철
Issued Date
2021
Type
Article
Keyword
Pd/Mg/TiPercolated surfaceH2 sensorFast response timestability
DOI
10.1016/j.apsusc.2021.149203
URI
https://oak.ulsan.ac.kr/handle/2021.oak/9065
https://ulsan-primo.hosted.exlibrisgroup.com/primo-explore/fulldisplay?docid=TN_cdi_gale_infotracacademiconefile_A654688298&context=PC&vid=ULSAN&lang=ko_KR&search_scope=default_scope&adaptor=primo_central_multiple_fe&tab=default_tab&query=any,contains,Highly%20catalytic%20hydrogen%20sensing%20properties%20of%20the%20nano%20percolated%20Pd%2F%20Mg%2FTi%20nanoparticles%20layers%20decorated%20on%20Si%20substrate&offset=0&pcAvailability=true
Publisher
APPLIED SURFACE SCIENCE
Location
네덜란드
Language
영어
ISSN
0169-4332
Citation Volume
549
Citation Number
1
Citation Start Page
149203
Citation End Page
149203
Appears in Collections:
Engineering > IT Convergence
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