Distance sensor with a tunable aperture actuated by thermal expansion of silicon chevron beams
- Publisher
- JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Location
- 영국
- Language
- 영어
- ISSN
- 0960-1317
- Citation Volume
- 31
- Citation Number
- 6
- Citation Start Page
- 065006
- Citation End Page
- 065006
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Appears in Collections:
- Engineering > IT Convergence
- 공개 및 라이선스
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