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Distance sensor with a tunable aperture actuated by thermal expansion of silicon chevron beams

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Abstract
To measure the distance of an object, we propose a distance sensor that combines a tunable aperture operated by the thermal expansion of silicon chevron beams with a commercial camera similar to the automotive black box. The distance sensor is composed of a tunable aperture, a lens with an 8 mm focal length, and a 1/4-inch full high definition image sensor, where a tunable aperture is attached to the camera lens. To estimate the distance to the object, the blur difference is expressed in the form of a depth map using the depth from defocus algorithm. The mean error of distance estimation was 0.29 m. The area of the tunable aperture in the distance sensor is 1.18 mm(2) at OFF state and 2.79 mm(2) when the voltage is applied. The distance sensor can display an image and a distance simultaneously and can be applied to autonomous vehicles, drones, and robots.
Author(s)
홍종호김현철Wisnu JatmikoKurianingsih전국진박병국
Issued Date
2021
Type
Article
Keyword
distance sensortunable aperturethermal expansionJoule's heatingsilicon chevron beamMEMS devicedepth from defocus
DOI
10.1088/1361-6439/abfaa6
URI
https://oak.ulsan.ac.kr/handle/2021.oak/9068
https://ulsan-primo.hosted.exlibrisgroup.com/primo-explore/fulldisplay?docid=TN_cdi_crossref_primary_10_1088_1361_6439_abfaa6&context=PC&vid=ULSAN&lang=ko_KR&search_scope=default_scope&adaptor=primo_central_multiple_fe&tab=default_tab&query=any,contains,Distance%20sensor%20with%20a%20tunable%20aperture%20actuated%20by%20thermal%20expansion%20of%20silicon%20chevron%20be&offset=0&pcAvailability=true
Publisher
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Location
영국
Language
영어
ISSN
0960-1317
Citation Volume
31
Citation Number
6
Citation Start Page
065006
Citation End Page
065006
Appears in Collections:
Engineering > IT Convergence
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