최적화 기법을 이용한 두 파장 분할광학 박막 필터의 설계 및 제작

Abstract

광파장분할 다중화용 광학간섭박막계를 설계 제작하였다. 입사각 45°, 15층의 (?L?)? 형은 0.85㎛와 1.30㎛에서 반사율이 각각 99.16%, 0.38%의 계산치를 나타내었으며, 이 data를 이용한 결과 각 파장에 대해 반사율이 각각 94.01%, 2.60%의 실험치를 얻었다. 그리고 ?(LH)?형은 0.85㎛과 1.50㎛에서 계산치 99.09%, 1.27%, 실험치 97.5%. 3.30%의 반사율을 나타내었다. 한편 각 파장영역을 넓히기 위해 17층으로 5개의 matching layer를 고려했을 때 반사율이 99% 이상이 0.76∼0.92㎛영역에서, 1%이하가 1.18∼1.40㎛ 영역인 박막계와 99%이상이 0.80∼0.91㎛ 영역에서, 1%이하가 1.34∼1.58㎛ 영역인 박막계를 설계하였다.

The dichronic interference filters which can be used as two channel wavelength division multiplexer are designed and the reflectances are determined both numerically and experimentally. The calculated reflectance and its experimental reflectance of (?L?)? type filter at 45˚incidence, are 99.16%, 94.01% respectively at 0.85㎛ and 0.38%, 2.60% respectively at 1.30㎛. And the calculated reflectance and its experimental reflectance of ?(LH)? type one are 99.09%, 97.5% respectively at 0.85㎛ and 1.27%, 3.30% respectively at 1.5㎛. In order to treat wider wavelength region, two 17 layer dichroic filters, which have 5 matching layers, are designed at 45°incidence. The calculated reflectance of one is more than 99% in the region 0.76∼0.92㎛and less than 1% in 1.18∼1.40㎛, and the calculated reflectance of another is more than 99% in 0.80~0.91㎛ and less than 1% in 1.34~1.58㎛.

The dichronic interference filters which can be used as two channel wavelength division multiplexer are designed and the reflectances are determined both numerically and experimentally. The calculated reflectance and its experimental reflectance of (?L?)? type filter at 45˚incidence, are 99.16%, 94.01% respectively at 0.85㎛ and 0.38%, 2.60% respectively at 1.30㎛. And the calculated reflectance and its experimental reflectance of ?(LH)? type one are 99.09%, 97.5% respectively at 0.85㎛ and 1.27%, 3.30% respectively at 1.5㎛. In order to treat wider wavelength region, two 17 layer dichroic filters, which have 5 matching layers, are designed at 45°incidence. The calculated reflectance of one is more than 99% in the region 0.76∼0.92㎛and less than 1% in 1.18∼1.40㎛, and the calculated reflectance of another is more than 99% in 0.80~0.91㎛ and less than 1% in 1.34~1.58㎛.